Unconventional Patterning at the Nanoscale
SOFT LITHOGRAPHY
Molding - Replica Molding (RM)
Replica molding and related molding techniques are practical methods for fabricating structures
as small as 30 nm in organic polymers with accuracy in vertical dimension of 5 nm.
MATERIALS:
- Patterned PDMS mold
- Liquid Polyurethane prepolymer
- Glass Slides
- UV lamp
- Sharp scalpel
PROCEDURE: (Click on pictures to view the videos)
*You will need QuickTime Player installed on your computer to view the videos.
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Clean the glass slide with soap and water and then rinse with ethanol. Dry under
a stream of nitrogen.
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Using a fresh blade on your scalpel, cut out a stamp that is patterned with circles
or other shapes.
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Place several drops of the liquid polyurethane prepolymer onto a glass slide (so
that it creates a puddle about the size of your stamp)
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Gently place the patterned side of the stamp into contact with the liquid polymer.
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Place your sample under a UV lamp for five minutes.
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Remove the stamp and place facedown on a clean glass slide. Look at your sample
underneath an AFM.
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QUESTIONS:
- Characterize your RM, MIMIC and SAMIM samples using the AFM and compare it to your
PDMS mold. How well did the pattern transfer?
- Compare and contrast the three molding techniques—RM, MIMIC, and
SAMIM. What are their advantages and disadvantages?
- Which technique produced the best replication of the CD pattern from the PDMS stamp?
- In molding techniques, how does the pattern compare with the pattern of the stamp?
- How could you obtain the exact pattern as the one on the stamp?
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Authors:
Prof. Teri W. Odom,
Dr. M. Viswanathan and Y. Babayan
Institution:
Northwestern University
Evanston, IL USA
Level:
College and above
In the classroom:
This Course is a video lab manual for hands on fabrication and characterization of materials at the nanoscale.
Materials requirements range from simple chemicals, benchtop tools and CDs to necessary access to
advanced characterization equipment such as an Scanning Tunneling Microscope.>
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