Unconventional Patterning at the Nanoscale
SOFT LITHOGRAPHY
Molding - Solvent-Assisted Micromolding (SAMIM)
SAMIM is useful for fabricating structures and modifying surface morphologies of polymers.
The operational principle of this technique shares characteristics with both embossing
and replica molding.
PRINCIPLE:
The key element of SAMIM is wetting of the PDMS mold by a solvent and conformal contact
between the elastomer mold and the substrate. The liquid solvent fills the recessed regions
on the surface of the PDMS mold in order to minimize the area of the liquid/vapor interface
and maximize that of the solid/liquid interface.
MATERIALS:
- Patterned PDMS mold
- Photoresist coated Si wafers
- Ethanol
- Sharp scalpel, Razor blade, Glass slides
PROCEDURE: (Click on pictures to view the videos)
*You will need QuickTime Player installed on your computer to view the videos.
Download Player: For
Mac | For PC |
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Using a fresh blade on your scalpel, cut out a stamp that is patterned with lines.
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Cut the photoresist coated silicon wafer into 4-8 pieces. Remember, the photoresist
is sensitive to light!!
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Wet a clean cloth with ethanol and rub the surface of the patterned stamp.
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Immediately place the stamp into contact with the photoresist coated surface.
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Keep the stamp in conformal contact with the surface until the solvent evaporates
(2-3 min). Remove the stamp from the surface.
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You should see an even diffraction pattern indicating that you have embossed the
surface of the photoresist.
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QUESTIONS:
» See the Replica Molding Section.
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Authors:
Prof. Teri W. Odom,
Dr. M. Viswanathan and Y. Babayan
Institution:
Northwestern University
Evanston, IL USA
Level:
College and above
In the classroom:
This Course is a video lab manual for hands on fabrication and characterization of materials at the nanoscale.
Materials requirements range from simple chemicals, benchtop tools and CDs to necessary access to
advanced characterization equipment such as an Scanning Tunneling Microscope.
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